Dates 2018: September 18th, 20th, 25th, 27th, October 2nd and 4th.
WVASE Online Training Course 2018
LOT-QuantumDesign GmbH, Darmstadt
-----Start of each session: 14:30 CET (Central European Time, German Time)----
LOT-QuantumDesign GmbH together with the J.A. Woollam Co., Inc. is happy to announce the first Online Training course on WVASE Ellipsometry Data Analysis that targets intermediate to advanced user. Students should have at least some ellipsometry experience and a proficiency with WVASE software. The course will spread over three weeks, with two 1 ½ hours online training sessions per week.
This course introduces the user to the model building and analysis of ellipsometric data, using the J. A. Woollam WVASE software. The instructors will introduce a variety of analysis strategies using data from real samples.
Participants will be able to download a pdf copy of the WVASE® Software Training Manual, as well as example data files from that manual. Many of the practice examples introduced during the lectures are also discussed in detail in the WVASE® Software Training Manual.
In addition to internet-sessions, students will receive example data sets in order to practice the strategies discussed during the sessions. Many of the examples are also described in detail in the WVASE® Software Training Manual, so students can use the manual to learn the strategies and procedures.
We strongly recommend that you practice these examples. It is the only way to really learn the software and analysis procedures.
After students complete the example data sets, they can email their final results to the instructors as WVASE Environment files. Those files will be reviewed, and students will receive emails with comments.
Certificates of Participation will be given to registered participants who submit all of the example homework problems for review. Perfection is neither expected nor required – to receive a Certificate, we only want you to submit your best effort for each example.
Recordings of all sessions will made available to participants during the course and for a period afterwards.
|Session 1 : Intro to Ellipsometry||The first session is a review the basics of ellipsometric theory, model building and data fitting. The basics of the WVASE model building and analysis will be introduced, followed by analysis examples from several semiconductor substrates.|
|Session 2: Transparent substrates & films||Students learn how use the Cauchy dispersion equation to describe the index of transparent materials. They will also learn how thickness and index affect interference oscillations in ellipsometric data, and use that knowledge to determine thickness and index of transparent films of unknown materials. Surface roughness (Effective Medium Approximation), graded index films, and global fitting will be introduced.|
|Session 3: Absorption & GenOsc||Almost all materials are absorbing over some portion of the measured spectral range. Modeling data form absorbing spectral regions requires different strategies than the ones applied to transparent spectral regions. |
Those strategies include the Point-by-point fit, which determines the tabulated n(λ) & k(λ) values of a layer, and the Generalized Oscillator (GenOsc) layer, which allows the user to create parameterized functions of transparent & absorbing materials, and has certain advantages over the point-by-point method.
|Session 4: Applying the GenOsc to fit data||Students will be introduced to different strategies to fit ellipsometric data using the Genosc layer.|
|Session 5: Non-ideal samples & measurements; Anisotropy||Many samples are not ideal – the data may be affected thickness nonuniformity, light bandwidth, angular spread and backside reflections. This session describes how to recognize and model these non-idealities. It also introduces the concept of depolarization. |
There will also be a brief discussion of anisotropy with examples of transparent anisotropic films.
|Session 6: Absorbing materials||Special measurement and analysis strategies are often required for materials that absorb at all wavelengths (such as metals). We will review three of those strategies, and demonstrate them with examples. |
The course closes with a review session.
Registration WVASE Course 2018
Deadline for registration is August 28th, 2018.
Registration fee for the WVASE Online Training Course:
200,- € net regular registration
150,- € net student registration - on request (not applicable to PhD students)
Registration fee includes:
- invitation to online training course
- pdf copies of the presentations
- WVASE® Training Manual as pdf download, and folder containing the example data files for the manual
- All demo data files used in the sessions
- offer to submit homework to the lecturer for review
- Any additional data files required for the homework
- A link to the video recording of each session after it is concluded
- Some additional reference material
The number of participants for the seminar is limited to 30 persons. After receiving your registration we will send a short confirmation and shortly after the invoice.
Final confirmation including invitation to login to the GoToTraining software will be sent app. 1 week before the first session and after the payment had been done.
Cancellation policy: In case of cancellation after payment was done, no refund is given.